PPT Slide

Optimized Rinse Summary

• Easiest, No Wet bench software changes;

• Up to 80% reduction at each wet process step without recycling;

• Three minutes rinse time (versus 7-15); ==>> productivity!

• Advanced Microdevices (Austin and Sunnyvale)

• Texas Instruments (Dallas and Houston)

• Hewlett Packard (San Jose, Palo Alto, Newark)

• Digital Equipment (Hudson)

• Motorola (Austin, Chandler)

• Seimens, Dresden

• Phillips, Hamburg

• Hyundai, Seoul

• and more

Progress? Assessment and/or implementation so far:

The Downside? Process verification needed, and not enough gain. Next, Extreme RO!

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