PPT Slide

Extreme Rinse Optimization

This approach offers much more opportunity

Step:

Liters of Water Used

No Recycle

Elapsed

Time

1. Just before the wafers

enter, dump the tank!

-0:03

2. Turn the sprayers on.

0

0

-0:01

3. Open the drain

0

0

-0:01

4. Lower wafers into tank.

0

0

0:00

5. Spray 30 seconds.

15

15

0:30

6. Close the drain.

15

15

0:32

7. Fill the tank

44

15

0:55

8. Dump the tank

44

15

0:55

9. Spray 20 seconds, off

54

15

1:15

10. Remove wafers.

54

15

1:20

Recycle All but

the first

spray

What is Extreme RO?

A shower instead of a bath!

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