PPT Slide
Spent
Rinsewaters
Carbon
Bed
254
nm
UV
30,000
uW
Return
RO
Storage
Tank
3300
gal.
Fab
450
gal.
TOC, Ohms
UPW System
AWN
TOC, Ohms
AWN
CMP Area
Water
EDI
Clean
Contaminated
?
Ohms
Cleaning up
ULSI Water Generation/Recycle System
?
?
TOC destruct
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