PPT Slide

• Highly positive ROI in water use/  discharge costs alone

• Exceed the SIA Roadmap milestones

• Total process freedom from water use constraints

• Decreased fab downtime

• Large positive impact on UPW Cost of  Ownership

• Far Exceed community use/discharge needs

EDI allows recycling virtually ALL rinse water from ALL process rinses! It’s 95-98% water-efficient.

• Lower system maintenance and downtime; chemical use; energy costs

• Increase water quality to the fab

• Support fab expansion with just drain (collection) pipes

• Increase AWN efficiency

• Recover ‘difficult’ water

• Even CMP water

How? Just collect all rinse water, run it through the EDI, and re-use the water!

All These Amazing Benefits:

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