PPT Slide
- Extreme Rinse Optimization on a solvent/aqueous wet bench for water recovery. (Works Great!)
- Plumbing Deionized Water to clean room exhaust scrubber to ‘close the loop’ through the EDI. ‘Zero Discharge’ scrubber operation gives major operations/CoO benefits. (Scrubber too dirty!)
- Implementation of Rinse Optimization to current equipment set. (Fab Shutdown!)
- Organics (Worst Fears) testing. Rejection of any ionizable organic (HAC, TMAH, NMP, etc).
Ongoing Research (Update)